Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Model No: CHEMICAL CONN BOARD

Model No: CHEMICAL CONN BOARD This TEL Tokyo Electron CPC-G226A01B-11 Chemical Connection Board PCB is used working surplus

Part No: MEC81104-201L

Inventory # A-11880

Removed from a Bio-Rad Quaestor Q5 Overlay Measurement System This is used working surplus

The unit is missing a hold down clip on the connector (see photos)

Plasma-Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Model No: CHEMICAL CONN BOARDPlasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare Inventory # 18192 Part No: 81539 Model No: Cassette Module Interlock Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System This Plasma Therm 81539 Cassette Module Interlock Board PCB Clusterlock 7000 Spare is used working surplus. Removed from a Plasma Therm Clusterlock 7000 PM RIE Reactive Ion Etching System. The physical condition is good, but