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Model No: AOU-03A
Inventory # A-19054
Made in the USA This Varian Ion Implant Systems D106527001 End Station Vacuum System Module is used working surplus
Part No: 03-00288-02
This Ebara 280953 Pump Emergency Off Switch Lot of 3 is used working surplus
Apex 1513 AE Advanced Energy 1.5kW RF Generator Water Leak Tested Working Model No: AOU-03AApex 1513 AE Advanced Energy 1. 5kW RF Generator Water Leak Tested Working Model No: RF Apex 1513 Input: 3, 208VAC, 50 60Hz Output: 1. 5kW @ 13. 56MHz CE Marked This unit was tested in our facility and is fully functional but there is a water leak at the water out connector. Requires analog control fixture for operation. Interlock cover is not included. The unit does not have a part, model, or serial number tag (see photos). The physical condition is
