Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working This UNIT Instruments UFC-2050A Mass

This UNIT Instruments UFC-2050A Mass Flow Controller MFC 30 SLM N2 is used working surplus

img{max-width:100%} GasTech 81-0221 H2 Gas Calibration Kit ASM 83-107564A06 New

Daughterboard Part No: 4000-60053-00

Unit has a minor bent of the frame and is missing some of the rear cover screws (see photos)

Estimated Packed Shipping Dimensions: L x W x H = 36"x30"x18" @  lbs

Trikon Technologies Sigma 200 Calibration Kit 150mm 715917/A SPTS KLA Working This UNIT Instruments UFC-2050A MassTrikon Technologies Sigma 200 Calibration Kit 150mm 715917 A SPTS KLA Working Inventory # CONF 1614 Part No: SIGMA 200 CALIBRATION KIT Included Components Part No: 715917 A 150MM WAFER UNCOOLER SETUP DISC Part No: 715914 A GTM CASSETTE LOCATION TOOL Part No: 715900 B 150MM DEP HSE PLATEN ARM SETUP TOOL Part No: 715903 A GTM DEP ALIGNER CASSETTE SETUP TOOL Part No: 000 1293 23, Rev. B Part No: 001 9197 06, Rev. 4 T M Trikon Part No: 156311C04 150MM ARM